Used ULTRATECH Saturn Spectrum 3e #9280618 for sale

ULTRATECH Saturn Spectrum 3e
ID: 9280618
Vintage: 2004
Stepper 2004 vintage.
ULTRATECH Saturn Spectrum 3e is a high-performance stepping equipment designed for precision lithography projection applications. It is a multi-stage system with a phased array of three high-efficiency lenses, allowing shooting down to 0.2 micron nominals. The unit features an array of independent illumination sources, enabling the unit to detect edge defects, feature misalignments or overlaps quickly and accurately. ULTRATECH SATURN SPECTRUM 3 E has a flexible configuration, with an optional 4th lens included for high-resolution imaging. It also includes a patent-pending Sample Exchange Chamber, allowing users to switch out samples quickly and seamlessly. The machine is also highly durable and has a long-lasting design, guaranteeing the highest resolution over time. Saturn Spectrum 3e offers the capability of advanced optics settings, where optical settings can be adjusted to output precise imaging results. It also includes an innovative, highperformance camera tool. The on-board imaging software automatically synchronizes camera parameters with lithography structures. Additionally, users can capture images at the full-frame resolution, as well as images as small as 0.1 micron nominal. The asset is capable of fine lithography processes, such as CPA (Contour Point Accuracy) , or FPD (Fine Pitch Detection). SATURN SPECTRUM 3 E also includes a variety of adjustable parameters such as exposure intensity, optical imaging settings, etc. The model allows to select and quickly align various masks, wafers, or other specialized focuses when needed. Finally, ULTRATECH Saturn Spectrum 3e includes a range of safety features, such as onboard dust filters and a temperature-sensitive cooling equipment, which are designed to ensure optimal performance and protective measures. The system also includes a protective box in case of environmental accidents or other irregular situations. Overall, ULTRATECH SATURN SPECTRUM 3 E is a highly advanced wafer stepper that is designed to be reliable, efficient, and precise. Its many features allow users to quickly create the customized lithography results they desire, with the utmost accuracy and professional level results.
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