Used ULTRATECH Saturn Spectrum 3e #9378645 for sale

ULTRATECH Saturn Spectrum 3e is a state-of-the-art precision wafer Stepper developed by ULTRATECH. It features a high-precision, automated stage that moves wafers with better uniformity and accuracy than competitive stepper solutions. ULTRATECH SATURN SPECTRUM 3 E carries out precise exposure patterning on the wafer using an ultra-accurate Zeiss Carl Zeiss Optics Beam Path equipment. The optics system consists of a high power laser, an illumination lens and a projection lens to capture the patterns from a mask plate onto the wafer. Saturn Spectrum 3e features an advanced 'Autofocus Sequence Control' unit (ASCS) that allows the operator to optimize focus settings for the desired job requirements. The ASCS machine also provides macro and micro lens profiles that adjust the intensity and focus of the laser to ensure high quality images. SATURN SPECTRUM 3 E is equipped with a 25W solid-state laser that utilizes direct-write technology to reduce recoat time and improve the quality of patterns written onto the wafer. This innovative laser tool is capable of scanning small feature sizes with excellent edge acuity and excellent depth-of-focus. ULTRATECH Saturn Spectrum 3e has a fully automated process control module that allows operators to monitor in-process process variations and provides predictive diagnostic capabilities. This module also enables operators to adjust the parameters for each wafer based on its material and process recipe without manually having to change the stepper's settings. The closed-loop optimization capabilities of the stepper allows for more precise patterning with greater accuracy The design of ULTRATECH SATURN SPECTRUM 3 E allows for high throughput and accuracy for a variety of semiconductor circuit patterning applications. This stepper offers fast, reliable, and cost effective performance for processes such as photolithography, ion milling, and physical vapor deposition. It is designed to work with both optical and thermally-stable materials. Saturn Spectrum 3e comes with a wide variety of options such as programmable error-correction tools, specialty exposure masks, advanced automation features, auto-tweak and auto-align features, and a sophisticated metrology suite that supports a variety of in-line optical and scanning techniques. In conclusion, SATURN SPECTRUM 3 E is a state-of-the-art, high-precision wafer stepper that offers breakthrough performance for patterning processes with a wide range of substrate materials. It has highly accurate and automated features that help to reduce process variation and provide reliable process performance. It is the ideal tool for precision patterning applications in the semiconductor industry.