Used ULTRATECH Spectrum 3 #9128729 for sale

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ULTRATECH Spectrum 3
Sold
Manufacturer
ULTRATECH
Model
Spectrum 3
ID: 9128729
Wafer Size: 8"
Wafer stepper, 8".
ULTRATECH Spectrum 3 is a state-of-the-art wafer stepper - an advanced machine capable of producing fine-detail microelectronic circuitry on round wafers. As part of its Spectra line of advanced photolithography systems, Spectrum 3 features advanced precision and accuracy while providing unparalleled levels of automation and user control. Featuring a class-leading scanning speed of up to 2500 micron/second, ULTRATECH Spectrum 3 is capable of producing intricate circuitry in a fraction of the time required by conventional systems. The equipment's patented Pulse Tuning Technology ensures minimum thermal disturbance while scanning, thereby ensuring precise registration of the image across the wafer. Spectrum 3 supports industry standard repeat conditions, allowing it to operate with a wide range of optical materials, including heavy metals and dense etch resists. Offering unmatched levels of automation, ULTRATECH Spectrum 3 can be used in single or two-exposure modes. In two-exposure mode, it can be operated with either poly-lithographic or stepped exposure patterns. Further, it features computer-controlled automatic focus adjustment that ensures optimized focus across the wafer, minimising distortion resulting from any wafer contour non-uniformity. Spectrum 3 has been designed for maximum flexibility and scalability. It has an integrated, modular robotics system with eight cassettes that can be pre-loaded with wafers. This allows for a continuous and automated operation with no manual loading or wafer handling necessary. The unit can also be operated in an unattended mode, significantly reducing labour costs. Additionally, quick-change cassettes allow for multiple wafer sizes to be used in a single machine. Parameters for each photolithography chamber can be individually programmed, allowing ULTRATECH Spectrum 3 to meet the most demanding tolerance requirements. The tool also features an intuitive user interface that includes an interactive graphic overlay to assist with setup and operation options. At ULTRATECH, providing the most advanced photolithography systems is only part of the equation. The company provides unparalleled levels of service and support, ensuring that every asset is performing at its best. ULTRATECH network of engineers and service technicians are available 24/7, offering assistance with installation, maintenance, repair, and training. All of this ensures that customers can confidently rely on ULTRATECH systems for all their photolithography needs.
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