Used ULTRATECH Spectrum 3 #9243698 for sale

ULTRATECH Spectrum 3
Manufacturer
ULTRATECH
Model
Spectrum 3
ID: 9243698
Wafer Size: 8"
Vintage: 2006
Stepper, 8" 2006 vintage.
ULTRATECH Spectrum 3 is a state-of-the-art wafer stepper that uses advanced lithography technology to create fine circuits and geometric shapes on semiconductor wafers. This machine offers superior accuracy, speed, and reliability in single- and double-patterning processes. Spectrum 3's 5-axis motion control equipment helps to reduce cycle times and improve uniformity and accuracy. It features an integrated wafer alignment system which provides sub-micron accuracy in positioning the wafer over a 3D registration platform, which ensures superior wafer overlay. The dual-axis scriber head ensures the precise reproduction of the image onto the litho film, and the scanning unit evenly exposes each die with lined or boxed scan patterns at speeds up to 30um/s. ULTRATECH Spectrum 3 is designed for process versatility and scalability, which allows it to be used with diverse reticle sizes and slit designs. It is powered by a high-performance stepper motor that delivers the highest mechanical precision and repeatability. The machine also features an advanced optics platform that improves lithography performance through optimization of illumination, numerical aperture, and focus control. It incorporates integrated vibration isolation technology to minimize deterioration in lithographic processes due to vibration or temperature. Spectrum 3's electronics tool is fundamentally designed to maximize photoresist coating accuracy. It features a wide range of control options, including a digital display, and a controller with an easy-to-use graphical user interface. ULTRATECH Spectrum 3 also offers a choice of image analysis tools, including the CEL automated fault detection asset, which provides remote diagnostic capabilities and real-time feedback from the model. Overall, Spectrum 3 is a powerful and effective wafer stepper that is designed to ensure superior functionality in a variety of lithography processes. It offers unprecedented accuracy, speed, and reproducibility, and is designed to streamline the production process while providing unparalleled quality control.
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