Used ULTRATECH Spectrum 3 #9395523 for sale
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ULTRATECH Spectrum 3 is a wafer stepper developed with a focus on providing accurate processing and optimization for the microelectronic device fabrication process. This stepper is designed for high resolution lithography, providing precision and high throughput for the challenging process of manufacturing small feature sizes. Spectrum 3 features a 254nm laser-based system that produces intense UV light capable of writing a variety of advanced patterns onto semiconductor wafers. This stepper also features advanced imaging capabilities. The slit-scan imaging of the wafer performance matrix optimizes the exposure of each crystal element, ensuring the highest quality of copies. In addition, its Digital Image Stabilization (DIS) feature results in superior overlay alignment and smoother image output. ULTRATECH Spectrum 3 is designed with a high depth of field and an optimized focus system to increase throughput. Its advanced optics also increase substrate size capability while maintaining the same focus and overlay accuracy, with support for both 5" and 8" wafers. It is also compatible with a variety of lithographic materials including SOG, deep UV epoxies, and PIBC. Aside from its advanced lithography features, Spectrum 3 is designed with a host of specialized functions. It supports various advanced functions such as substrate routing, both in-site and cross-site stitching, and serial overlay alignment. Its high throughput and accuracy also reduce the time needed to gain feedback for lithography control. Additionally, this stepper is designed with a chemical-resistant construction, allowing it to handle exposure and processing conditions outside the scope of traditional steppers. Overall, ULTRATECH Spectrum 3 is a powerful wafer stepper designed for advanced microelectronic device fabrication. Through its high resolution lithography capabilities and specialized features, this stepper can provide excellent throughput and accuracy, making it the perfect choice for highly precise and technologically advanced operations.
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