Used ULTRATECH Spectrum 3e #9249076 for sale

ULTRATECH Spectrum 3e
Manufacturer
ULTRATECH
Model
Spectrum 3e
ID: 9249076
Stepper.
ULTRATECH Spectrum 3e is a high-end, mid-range wafer stepper designed to be a cost-effective solution to the demands of emerging lithography applications. This stepper is designed to provide precise and repeatable imaging of wafers. Spectrum 3e is able to produce wafer images of the highest quality with accuracy and repeatability, and provides superior process control of critical lithography parameters for consistent performance. ULTRATECH Spectrum 3e features a range of advanced features and powerful tools to increase throughput and output accuracy. The user-friendly interfacing equipment allows for precise control of imaging parameters and rapid set-up, making this stepper perfect for quick turnaround time and high quality results. The machine's lithography head offers variable numerical aperture and deflection sensing, improving step size and repeatability without compromising accuracy. Furthermore, the integrated optics equalizer offers precise accuracy for inputting and aligning challenging reticles. The stepper also houses an integrated overlay measurement system that offers non-contact, non-destructive measurements of 3-D layers and mask image heights. Additionally, UV LED or mercury arc lamps can be used for exposure, allowing the flexibility of optimizing both process and resolution requirements, while maintaining low particle introduction and image quality. The integrated reticle inspection unit has superior resolution capabilities, allowing for higher throughput and yield. The advanced reticle scanner of Spectrum 3e can accurately detect defects that are as small as 0.3 microns, allowing for the detection of even the most challenging defects and anomalies. This machine also supports 2-D and 3-D scanning capabilities of oblique and profile views. ULTRATECH Spectrum 3e also offers an array of other features that contribute to its status as a high performance, cost-effective tool. It provides vacuum hold downs, adjustable height stages, and an automatic level monitoring asset that can alert the user when a critical parameter changes unexpectedly. Furthermore, an advanced MOSFET dry pump controls air pressure and gas flow, while mass flow controllers assist in ensuring clean environment and preventing contamination. Spectrum 3e is a reliable and capable wafer stepper, offering a highly accurate and repeatable imaging solution for all of your lithography needs. Its powerful features and advanced technologies enable ULTRATECH Spectrum 3e to offer superior performance, ultimately leading to enhanced quality and increased yield.
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