Used ULTRATECH Star 100 #293617180 for sale
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ID: 293617180
Vintage: 2006
Stepper
Illumination field size: 39 x 18 mm
Light pipe type: Diffuser
Field size: 30 x 18 mm
MVS Type:
Patmax
Series 2 bridge
Flipper less
Reticle size: 3" x 5"
PC With windows 2000 Platform
Air probe type: Round
Edge switch: Air probe
Theta stage: Pop-up
Wafer handler:
Round chuck, 4"
Autoloader, 4"
Options:
Chuck and autoloader, 5" and 6"
Upgraded to automation robot system
2006 vintage.
ULTRATECH Star 100 is a wafer stepper designed for advanced photolithographic processes. It provides excellent resolution and accuracy for various central processes such as metrology and inspection, allowing for an easier and more efficient production process. ULTRATECH STAR100 is an advanced photolithographic stepper that is capable of handling a wide range of wafer sizes, from 6-inch to 12-inch. It features a high power UV source with 350 W lamp, 0.25 - 4.00 NA numerical aperture catadioptric illumination, along with 10X/6X optical reduction. This allows the device to create high-resolution images with good depth of field, depth of focus, and high-contrast image unctionality. Star 100 is outfitted with positioning systems both at the wafer plane and step-and-repeat levels. This provides high accuracy with quick-repeat positioning and a high step-and-repeat rate, which allows for larger process areas to be covered more quickly while keeping the accuracy of the process high. Additionally, the stepper is outfitted with a motorized wafer stage, which allows for fast and accurate wafer alignment. STAR100 also features an interactive user interface, which is simple and easy to use. The user has the ability to access a host of application software for graphical representation and analysis of the data. This allows the user to review data in both graphical and numerical formats. Additionally, the user interface can also be used to set up and control the exposure parameters. ULTRATECH Star 100 is a leader in the photolithography wafer stepper industry, providing excellent resolution and accuracy for advanced applications. It features a motorized wafer positioning system and a user interface for easy setting and operating. Additionally, its high power UV source allows for the creation of high-resolution images with good depth of field and depth of focus, allowing for finer details to be created in each image. ULTRATECH STAR100 is the perfect solution for users who need a powerful and reliable photolithographic stepper.
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