Used ULTRATECH XLS 7500 #9166601 for sale

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Manufacturer
ULTRATECH
Model
XLS 7500
ID: 9166601
i-Line lens Removed from TROPEL 2145 Reduction: 5x Wavelength I-line NA: 0.45 Field size (Without pellicle): 21 mm EPD (Entrance pupil distance): 273 mm Included: Illuminator optics Mirrors Kaleidoscope Condenser Documentation.
ULTRATECH XLS 7500 is a next generation wafer stepper from Panasonic designed for high precision imaging of entire die. It is an advanced optical imaging platform that automates the process of die placement on and off a wafer. XLS 7500 allows manufacturers to produce batches of wafers at up to seven times the speed of previous generations of steppers. The optical delivery equipment of ULTRATECH XLS 7500 offers superior performance in terms of resolution, focus shift and depth of focus. It also has an extended depth of focus range that allows for optimal flexibility when imaging wafers up to 300 mm in diameter. XLS 7500 is engineered with a smart imaging system so that it automatically adjusts exposure parameters as needed. This ensures high resolution imaging with minimal exposure times. ULTRATECH XLS 7500 is designed with a self-adjusting motor drive unit. This allows for precise and rapid wafer positioning across the entire resolution spectrum. The motor drive eliminates the need for manual adjustment, and ensures consistency in image quality across the wafer. XLS 7500 also offers an expansive view chain and capture area. This enables more warps to be loaded in a single exposure, thus allowing higher throughput. The stepper also features an integrated defect control machine which automatically identifies and eliminates defect wafers. This ensures that only pristine wafers are sent to the next stage of processing. ULTRATECH XLS 7500 also offers a comprehensive view alignment suite. It automatically maximizes the number of usable fields and examines the alignment of each field prior to image capture. This ensures that patterns are accurately placed across the entire wafer with minimal misalignment. XLS 7500 also allows for the integration with in-line metrology systems. This allows manufacturers to quantitatively measure the results of each of their die placement and imaging steps after each stepper exposure. This provides a high degree of accuracy in the production process. Overall, ULTRATECH XLS 7500 is a powerful and efficient wafer stepper designed to produce batches of wafer at up to seven times the speed of previous generations of steppers. It combines a powerful optical imaging tool with integrated defect control and alignment systems, and an integrated motor drive asset. It also provides a comprehensive view chain and capture area, and integration with in-line metrology systems, allowing for highly accurate production process.
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