Used AMAT / APPLIED MATERIALS NANOSEM 3D #9145242 for sale
Wafer Size: 8"
Metrology system, 8" CD SEM with 3D capability Open cassette 2002 vintage.
AMAT / APPLIED MATERIALS NANOSEM 3D equipment is a wafer testing and metrology system developed to provide ultra-high resolution imaging and measurement of devices on a wafer. This cutting-edge unit utilizes a sophisticated technology to create 3D capture and analysis of nanoscale devices, enabling users to obtain highly-accurate measurements of existing structures. AMAT NANOSEM 3D machine is designed to work with soft (non-modulation contrast) electron microscopy on both imaging and measurements. It utilizes the latest scanning electron microscopy (SEM) technology, through users can easily switch between bright field, dark field, channeling contrast and others. It achieves resolutions at the nanometer level, allowing users to obtain highly-detailed information about the structures of their devices. The tool includes an automated wafer stage for scanning and measuring wafers automatically. The stage supports standard rounds and square wafers, offering complete automation from mounting to unmounting. The advanced motion control of this stage also allows for highly-precise adjustments to be made. APPLIED MATERIALS NANOSEM 3D asset utilizes a patented high-performance EDS detector, which enables high-throughput analysis and imaging of small particles with superior sensitivity. This detector is also capable of capturing high-resolution compositional data of nanoparticles, including those in a crystalline state. NANOSEM 3D model is capable of storing large numbers of images and data acquired from the scanning and measuring process, ensuring that all analysis results are easily tracked. The equipment also offers a variety of advanced analysis tools, which enable users to review and measure data more accurately. AMAT / APPLIED MATERIALS NANOSEM 3D system is a powerful tool for wafer testing and metrology, providing users with the ability to obtain highly-accurate measurements of their devices. The unit's unique features are ideal for the nanoscale device market, enabling users to obtain comprehensive results from their experiments with ease.
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