Used AMAT / APPLIED MATERIALS VeraSEM 3D #9293429 for sale
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ID: 9293429
Wafer Size: 12"
Vintage: 2002
Scanning Electron Microscope (SEM), 12"
SMIF Type
Reticle size, 6"
Wafer of type: Notch at 6 o'clock
Stage: (3) Load ports
2002 vintage.
AMAT / APPLIED MATERIALS VeraSEM 3D is a new generation of wafer testing and metrology solutions from AMAT. It features an advanced equipment architecture and state-of-the-art sensor technology, making it one of the most powerful wafer testing and metrology solutions available today. AMAT VeraSEM 3D utilizes a multi-sensor platform that integrates three component sensors - a mapping laser, surface analyzer, and imaging camera - with an advanced system architecture. The mapping laser uses a fast, non-destructive beam of light to precisely map the surface of the wafer and provide data for the surface imaging and analysis. The surface analyzer provides accurate surface characterization data including surface topology, profile, and roughness characteristics. Finally, the imaging camera captures detailed surface images of the wafer to provide invaluable data on microstructural defects and other variations. APPLIED MATERIALS VeraSEM 3D leverages APPLIED MATERIALS decades of experience in wafer testing and metrology to provide customers with an unrivaled level of accuracy and repeatability. It has the ability to achieve a 3-D surface resolution better than 5 nm, with a minimum feature size of just 40 nm. Its advanced algorithms are capable of detecting and measuring features with a size variation as small as 0.1 micron. The unit is also equipped with proprietary image analysis algorithms for defect detection and classification, providing operators with a fast and reliable way to detect and control process variations. VeraSEM 3D is designed to meet the demanding requirements of semiconductor and related industries. Its high-speed data acquisition and processing capabilities can help operators to quickly and accurately identify defects and initiate process correction if needed. The machine also provides a dedicated user-friendly graphical user interface which simplifies wafer inspection and metrology tasks and enables full customization. Overall, AMAT / APPLIED MATERIALS VeraSEM 3D is a powerful and versatile wafer testing and metrology solution that combines state-of-the-art sensing technology, tool architecture, and proprietary algorithms to deliver superior accuracy and repeatability. It makes it easy for operators to analyze microstructural defects and other variations in wafers, allowing them to quickly optimize process control and yield enhancement.
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