Used AMAT / APPLIED MATERIALS VeraSEM 3D #9412455 for sale
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AMAT / APPLIED MATERIALS VeraSEM 3D is a wafer testing and metrology equipment designed to accurately measure the critical dimensions of electronic structures on the atomic level. It is capable of studying 3D microstructures using a non-destructive, high-resolution imaging technique and analytics. AMAT VeraSEM 3D is designed to provide information on the topology and orienation of individual features within a device as well as providing top-down characterization. This system has a throughput of up to 20 wafer locations per hour, with a measurement duration from seconds to minutes per die, depending of the complexity of the feature measurement. The unit is composed of a number of components, including an imaging chamber, a scanning electron microscope, and a sample preparation stage. The imaging chamber is a wetted machine and houses the sample, allowing for imaging over the preferable environment for proper device measurements. The scanning electron microscope (SEM) is an ultra-high resolution tool capable of producing images with feature sizes down to 5 nanometers in size. Finally, the sample preparation stage is used to create a flat, clean surface for imaging, as well as to process samples into a homogeneous layer ready for imaging. APPLIED MATERIALS VeraSEM 3D has the capability to automate scan types and scan routes, allowing the user to program on-the-fly imaging and metrology, as well as predefined 3D analysis routes. The asset also offers a variety of advanced metrology capabilities, such as film thickness measurement and composition analysis, composition mapping, and advanced image analysis. The performance of VeraSEM 3D is further enhanced by the use of its sophisticated software that is capable of providing a comprehensive analysis of the results. The software provides data-intensive tools for analyzing and interpreting the images and measurement data that can be used for various applications such as device lifetime prediction, multi-layer device simulation and statistical process control. In summary, AMAT / APPLIED MATERIALS VeraSEM 3D is a wafer testing and metrology model designed to analyze the critical dimensions of electronic structures on the atomic level. Its advanced software capabilities allow for complex scanning, imaging, and analysis processes, which can be used for various applications.
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