Used AMRAY / KLA / TENCOR AIT I #9401208 for sale
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ID: 9401208
Wafer Size: 8"
Double darkfield inspection system, 8"
Interface: SECS II/GEM Communication
Low contact chuck
Multi channel collection optics system with spatial filters
Wafer transfer area housing cover
Wafer handling module
High voltage electronics
Front and rear EMO’s with covers
Flat panel display
X,Y Drive
Controller chassis
Motion controller card
Blower box
Mouse
Pentium CPU
Fold down keyboard tray
Operating system: Windows NT.
KLA / TENCOR / PROMETRIX AIT I is an automated wafer testing and metrology equipment designed for volume production and active monitoring of semiconductor devices. The system measures semiconductor wafers using a fully automated sequence including wafer carrier handling, wafer alignment, sample placement and metrology data acquisition. The unit includes a metrology station with a dual-jointed arm, a sample carrier loader and unloader, a vision machine, and a spindle motor to perform automated surface scanning. A robust and repeatable wafer chuck aligns the wafers precisely with the metrology arm to ensure accuracy and repeatability of measurements. The metrology arm is capable of high precision, sub-micron movements, enabling measurements of small devices and bumps with extreme accuracy. KLA AIT I features a user-friendly touchscreen graphical user interface (GUI). The GUI provides real-time process feedback, feed-forward functions with statistical process control, and advanced data analysis for production and process optimization. It also provides comprehensive process and wafer engineering tools for process development and process engineering. The tool can measure a variety of parameters such as surface topography, electrical conduction, image contrast, and reflectivity. It can be used to predict and troubleshoot problems such as hot spots or fails, monitor film thicknesses and smoothness, check roughness and curvature of structures, characterize resistivity, and evaluate defectivity in semiconductor devices. TENCOR AIT I is powered by an advanced hardware and software architecture that provides reliable data capturing and analysis. Its innovative wafer handling asset ensures that wafers are loaded onto the station with high repeatability and accuracy. With its user-friendly touchscreen GUI and integrated software tools, operators can easily control the machine and make fast and reliable measurements. The model is reliable and affordable and is suitable for use in high-volume semiconductor manufacturing. It provides fast and accurate metrology data with its advanced image processing and machine vision equipment. The integrated software tools help to identify process trends and improve product yield.
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