Used APPLIED PRECISION / RUDOLPH WaferWorx #9248266 for sale
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ID: 9248266
Probing process analysis system
P/N: 53-450000-001
GENMARK Robot and prealigner
OLYMPUS MX80-F Inspection microscope
Objectives: 5x, 10x.
APPLIED PRECISION / RUDOLPH WaferWorx is a wafer testing and metrology equipment that helps ensure consistent, high quality wafer fabrication processes. The system offers multiple solutions for a variety of wafer testing and metrology analysis needs in the semiconductor and integrated circuit industries. RUDOLPH WaferWorx unit can measure various surface and height characteristics of wafers and complex structures. It offers numerous capabilities, including X-ray reflection and scattering, optical and electron microscopy, as well as probing techniques. These techniques allow for precise characterization of parameters such as voltage, resistivity, and surface morphology. Using APPLIED PRECISION WaferWorx, the shape, profile, and texture of the surface of any wafer can be determined to high accuracy. It is also able to measure features such as bumps, spines, and pits on the wafer, which are essential in the fabrication process. The machine includes modules for automatic wafer bed-tilt measurement, for measuring surface topography, and for imaging three-dimensional structures. It is also equipped with an auto-focus tool, which ensures accurate wafer positioning and measurements. The asset uses laser beam deflection as well, which allows for precise scanning and imaging. In addition, a unique Interactive Focus Alignment Tool (IFAT) algorithm is available, allowing the user to set different parameters subject to the specific testing and measuring requirements. The model also supports multi-user communication protocols for secure data transfer and storage. It can be operated using several software applications, and also supports industry-standard remote access. WaferWorx equipment is easy to install and use. It includes multiple hardware components, such as the wafer stage, processor, monitor, and laser beam deflection. Furthermore, the system includes monitoring modules with the ability to store and analyze wafer data. Overall, APPLIED PRECISION / RUDOLPH WaferWorx is an advanced wafer testing and metrology unit that helps ensure consistent, high-quality wafer fabrication processes. It offers numerous features, including X-ray reflection and scattering, optical and electron microscopy, and automatic wafer bed-tilt measurement, allowing for precise characterization of parameters such as voltage, resistivity, and surface morphology. Furthermore, the machine is easy to install and use, supporting multiple software applications.
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