Used ASM Dragon 2300 #9293646 for sale

ASM Dragon 2300
ID: 9293646
Wafer Size: 12"
Vintage: 2003
PECVD System for barrier, 12" 2003 vintage.
ASM Dragon 2300 is a wafer testing and metrology equipment that combines high accuracy, precision, automation, and process flexibility. This system combines an advanced optical tool, a large exposable area stage, and a robust software architecture allowing for the highest level of process control and repeatability. The optical tool utilizes a double-pass optical design that gives the unit a high level of accuracy and resolution. With a field-of-view of up to 46mm and an expansion of up to 290mm, Dragon 2300 offers an unprecedented level of flexibility to design, inspect, and measure devices of all sizes. It provides a wide range of vision capabilities, including 3D sample reconstruction, parallel/stark power measurements for non-destructive testing, and automated die-fail inspection. ASM Dragon 2300's comprehensive software package provides users with a modular, scalable, and open architecture. As an open platform, the machine supports an extensive library of models and technologies, allowing users to configure the tool to their specific process requirements. Its intuitive user interface suggests options and assists in the designing of the tests and inspections. The software provides users with the ability to maximize process control and precision by correctly executing measurements and testing procedures. Dragon 2300 also offers a wide range of automated metrology options for customers. Automated vacuum generation and integrated vector cleaning are provided, along with automated optical inspection for non-destructive tests. It also supports a wide variety of optional features, such as wafer dicing and handling, wafer mapping, and manual automated sample stage swap. Finally, ASM Dragon 2300's infrastructure is capable of handling multiple samples and lots simultaneously. Its high-precision linear motors allow for fast sample transfers, while an advanced vacuum asset provides precise and controlled air delivery for reliable sample handling and automated metrology. Combining advanced optics and software capabilities with a large exposable area stage, Dragon 2300 delivers industry-leading accuracy and resolution for wafer testing and metrology across multiple industries. This highly flexible and comprehensive model provides users with a platform to design, inspect, and measure devices of all sizes.
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