Used ASM Dragon 2300 #9294446 for sale

ID: 9294446
PECVD System, 12" Used for barrier 2003 vintage.
ASM Dragon 2300 Wafer Testing and Metrology Equipment is a versatile and powerful platform specifically designed for creating advancedyield-focused process control. The system utilizes a combination of automated optical inspection (AOI), resistivity metrology, dielectric capacitance metrology, and 3D profiling metrology technologies to quickly capture and analyze detailed wafer information. The unit features an advanced motorized wafer stage, allowing for fast and precise wafer alignment to ensure accurate results. AOI on Dragon 2300 utilizes brightfield imaging technology to detect defects, such as missing or damaged patterns, contamination, thin-film defects, and shorts. Features such as edge detection can help detect fine defects that can be difficult to detect with other methods. The resistivity metrology uses the resistance of a pattern to obtain information about the front side surface of a wafer. The dielectric capacitance metrology can quickly measure an IC's capacitance, as well as help identify any shorts that may exist in a given circuit. With the 3D profilometry metrology, the machine can characterize the topography of a wafer to a feature level of resolution of 10nm, which can be used to accurately measure fine non-conducting features and voids of less than 3 microns. The tool also features a multitude of image processing tools which allow for easy-to-use analysis of images, allowing for rapid yield and effectiveness studies. These tools allow for exploration of various yield parameters and can generate contour maps for comprehensive data analysis. ASM Dragon 2300 can be used for many other applications, such as wafer bonding, chemical-mechanical polishing (CMP), solder bumps, bump height metrology, etc. This asset can be customized to meet a variety of process control needs. In addition, Dragon 2300 is designed to meet the most stringent repeatability and accuracy requirements, making it the ideal choice for production environments.
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