Used ASML YieldStar S100 #293621217 for sale
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ID: 293621217
Wafer Size: 12"
Vintage: 2010
Overlay measurement system (IMM, DBO)
(2) Loadports
Chamber.
ASML YieldStar S100 is an advanced wafer testing and metrology equipment designed to detect defects and measure critical dimensions. This automated optical inspection system is capable of recognizing patterns and handling multiple types of substrates. It features a high-precision 3-axis linear motor stage and an advanced, high-performance imaging unit. ASML YIELDSTAR S-100 is capable of detecting defects down to 50nm on wafers measuring up to 200mm. It also has the ability to test multiple substrate types and measure a variety of feature sizes, including line widths and spacing, trench depths, and protrusions. The machine is equipped with a variety of advanced imaging and pattern recognition technologies, such as spectroscopy, UV illumination, Contour Recognition, Image Correlation, and Particle Analysis. YieldStar S100 is highly automated, allowing for batch processing of wafer samples in a single test run. It features a large variety of optical measuring devices, such as a stable long distance camera and an autofocus mechanism with an integrated pattern recognition tool. This asset is designed to detect defects quickly and accurately, leading to higher yield rates and production efficiency. In terms of data analysis, YIELDSTAR S-100 offers a number of powerful features. It is equipped with an embedded software library that is capable of analyzing defect images and detecting the occurrence and nature of defects. It also has advanced pattern recognition technology that can identify the root cause of a defect. This powerful model can also identify trends in pattern development and can be used to improve quality control and process optimization. Overall, ASML YieldStar S100 is an advanced wafer testing and metrology equipment that is capable of detecting defects and measuring critical dimensions quickly and accurately. It is automated and provides powerful data analysis tools, making it an ideal choice for semiconductor manufacturers looking for higher yields and more efficient production.
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