Used ASML Yieldstar S200B #9245628 for sale

ASML Yieldstar S200B
ID: 9245628
Wafer Size: 12"
Overlay measurement system, 12".
ASML Yieldstar S200B is a high-precision metrology equipment designed to measure wafer parameters and evaluate test patterns for lithographic fabrication. The system enables users to analyze quality in wafer fabrication processes, including critical dimensions (CD), line width roughness (LWR), and critical orientation (CO). The measurement unit features a one-stage transfer robot for precise sample transfer and alignment, an optical head with 100x/10x/0.45 numerical aperture objectives, an XYZ stage for sample capture and automatic focus control, and a high-resolution LCD monitor for enhanced image quality. The YieldStar also features adjustable lighting and a precise substrate chuck to eliminate reflections off the tested wafer. The machine's image processing capabilities include color imaging, digital grayscale imaging, image comparison, basic pattern recognition, and CD metrology. It also offers various pattern analysis tools and advanced features such as pattern search and field density measurement for high-resolution feature extraction and analysis. Yieldstar S200B tool provides reliable and accurate analysis through the combination of automated alignment and measurement techniques. Such features prove especially useful in applications such as nano-bump metrology, single device isolation/characterization, and microvias/interconnects analysis. The asset also features a software suite that provides complete control over the entire measurement and analysis process, enabling users to quickly and conveniently process test results and generate reports. With its versatile capabilities, the YieldStar is ideal for a wide range of applications in the semiconductor industry, such as analysis of variation in wafer characteristics, defect detection and characterization, and fabrication process development and optimization.
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