Used BROOKS AUTOMATİON Fixload 6 #293665341 for sale
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ID: 293665341
Vintage: 2011
Loadports
Used for NOVA NovaScan 3090 Next
Robot
Mini env frame
Track
Controller
2011 vintage.
BROOKS AUTOMATİON Fixload 6 is a wafer testing and metrology equipment designed for high throughput, accuracy, and reliability in wafer testing and metrology environments. The system boasts state-of-the-art hardware and powerful software and provides precise measurement of parameters such as wafer thickness, total thickness variation, flatness, between wafers, and crystalline defect identification in hundreds of samples per hour for semiconductor production. The advanced cutting-edge hardware features an optoelectronic-based multi-parametric sensor unit, a high resolution CCD camera for thermal imaging, and a precision laser displacement measurement sensor. This ensures accurate and reliable measurement of thousandths of a millimeter in wafer thickness, as well as the detection and characterization of crystalline defects, such as voids, cracks, and pinholes. Fixload 6's high speed wafer transport ensures fast data collection and high throughput rates, while maintaining a high degree of accuracy. Additionally, the auto-calibration function minimizes the need for manual calibration, optimizing performance and reducing the cost of ownership. The machine's software offers a comprehensive range of analysis tools for scientists and engineers to detect and understand a variety of defect characteristics. These include both 2D and 3D analysis, with precise quantification of defect type and size. Automated data extraction and analysis is enabled by the powerful manipulation and filtering of parameters such as surface roughness, critical dimensions, die-to-die alignment, and other chip-level defects. These capabilities are complemented by integrated mapping routines to enable rapid and accurate wafer patterning. For continuous process control, BROOKS AUTOMATİON Fixload 6's user-friendly software includes easy-to-use statistical process control tools and error mitigation algorithms to support recipe development. As well, the user can customize the software for unique applications with high levels of accuracy. Finally, Fixload 6 includes a range of advanced options, including wafer alignment, optical testing, and push/pull scanning capabilities for extended wafer testing functionality. This tool can be integrated into any type of process to provide optimized data acquisition, sample preparation, and detailed analysis. With its advanced features, users that require rapid, precise, reliable wafer testing and metrology can use BROOKS AUTOMATİON Fixload 6 to meet their needs.
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