Used BRUKER-AXS Dektak XT #9282889 for sale
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ID: 9282889
Wafer Size: 6"
Vintage: 2012
Profilometer, 6"
Operating system: Windows 7
Resolution:
Minimum X resolution: 0.017 microns per point
Full scale ranges: 6.5 microns, 65.5 microns, 524 microns, 1mm
Temperature: Operating range, 20°-25°C (68°-77°F)
Relative humidity: Less than 80% (Non-condensing)
Power demand: 1000 VA maximum
Power connection: Standard outlet
Warm-up time: 15 minutes for maximum stability
Vibration: < 70 µg from 1 to 100 Hz on floor with flat noise spectrum
Vacuum (For optional vacuum chuck):
457 - 635 mm Hg (18 - 25")
0.61 - .85 BAR minimum constant vacuum for system with one fitting for 4 mm (5/32") OD tubing
Clean, dry Air (For optional vibration isolation pads):
Max: 275kPa (40psi) clean air with 6.35mm (1/4") OD tubing
Regulator adjustable to 70 - 140 kPa (10-20 psi)
Clean, Dry Air (For optional floor model vibration isolation table):
345 kPa (50psi) clean air with 6.35mm (1/4") OD tubing
Acoustics: < 60 dB(A) across frequency spectrum
Input voltage: 100 - 240 VAC, 50/60 Hz
2012 vintage.
BRUKER-AXS Dektak XT is a wafer testing and metrology equipment used for automated quality control and statistical process control of silicon wafers. BRUKER-AXS DEKTAKXT is an essential tool for the efficient manufacturing of high-precision wafers in the semiconductor industry. The advanced technology of Dektak XT offers quick and accurate measurements of wafer coating cross section profiles, topography, and surface roughness. DEKTAKXT is a multi-functional metrology tool designed for obtaining detailed information about the surface of wafers. The automated system utilizes an ultra-high accuracy, non-contact, vertical scanning, and interference-free profiling unit to measure the topography, cross section profile, and surface roughness of both bare and coated wafers. The topography readings are taken using a Contour Technology optical profilometer with extraordinary sensitivity, optional interlocks and sample data loggers. BRUKER-AXS Dektak XT is equipped with advanced optoelectronic components that ensure the highest quality results with precision ranging from 0.1nm to 10µm. BRUKER-AXS DEKTAKXT provides quality assurance by acquiring and quantifying wafer coatings and material deposition on the surface and near the edges of the wafer. Dektak XT also implements a non-destructive testing (NDT) process that eliminates the need for sample destruction—thereby reducing production costs. DEKTAKXT also offers a high degree of automation. It is equipped with a robotic load/unload machine and features real-time data acquisition, data archiving, and full-range plotting options. This makes it easy for its users to store, access, and compare data on previously tested wafers for quick analysis. BRUKER-AXS Dektak XT is the perfect solution for advanced wafer testing and metrology. It ensures accurate wafer testing, quality assurance, and cost-efficiency, making it the ideal choice for the semiconductor industry.
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