Used CAMECA Lexfab 300 #293616123 for sale
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ID: 293616123
Shallow probe metrology system
BROOKS AUTOMATION Magnatran 7, P/N: 003-1600-29
VARIAN Turbo-V 81-AG
VAT 02112-BA24-BBJ1.
CAMECA Lexfab 300 is a wafer testing and metrology equipment designed to measure the physical and chemical properties of semiconductor wafers. This system is designed to provide wafer test results with a high degree of accuracy, while providing excellent repeatability. The unit utilizes a Capacitively Coupled Plasma (CCP) source which is capable of scanning up to 300mm² wafers, which ensures that it can keep up with the fast-moving pace of today's rapidly advancing semiconductor industry. It also includes a Variable Pressure Tri-Wavelength Spectrometer which is capable of analyzing the atomic elements on the wafer's surface, using information from three different wavelengths. This data is then displayed in user-friendly graphical reports, allowing for rapid analysis and interpretation of the results. As well as the CCP source and Tri-Wavelength Spectrometer, the machine also features a Wet-Etch Cathodoluminescence (WECL) tool. This asset works by producing intense blue light when the coated wafer is exposed to a high electrical charge, helping to identify any defects on the surface. The model also includes a wet chemical etching station, allowing for the removal of metallic contaminants or other surface contaminants. The equipment can also be used to perform spectral imaging and mapping of wafers, which in turn allows for the identification of any localized regions of contamination. The image is then captured, and displayed in various formats, giving users the ability to closely examine contaminants in detail. The system is also highly modular, allowing for monitoring and control of various parameters such as pressure, temperature, and power supplied to the plasma source. This ensures that the unit is able to produce repeatable test results quickly, and efficiently. Overall, CAMECA LEXFAB300 is an excellent machine for testing, measuring and analyzing semiconductor wafers. It features a range of powerful tools and features, giving users the ability to quickly obtain accurate results from their wafer testing program. Furthermore, its modularity ensures that the tool can be easily adjusted to suit the needs of any specific test program.
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