Used CAMECA Lexfab 300 #293639185 for sale
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ID: 293639185
Wafer Size: 12"
Vintage: 2010
Shallow probe metrology system, 12"
2010 vintage.
CAMECA Lexfab 300 is a high-performance multi-modal wafer testing and metrology equipment. It is a versatile tool that is capable of performing various measurements from atomic force microscopy (AFM) to optical spectroscopy. The system is a dual chamber structure, with the top chamber serving as an AFM for imaging, force spectroscopy and other operation techniques, while the lower chamber serves as a spectroscopy chamber for optical measurements. The AFM itself is equipped with a closed-loop scanner which can reach a resolution of 1 nanometer and scanning rates of up to 100Hz. The spectroscopy chamber is equipped with a spectrometer and multiple illumination sources, enabling measurements such as reflectance, transmittance, and fluorescence. The unit also features an automated wafer handling machine, enabling easy and fast transfer of wafers in the two chambers. CAMECA LEXFAB300 is capable of performing a variety of measurements, making it a flexible tool in research and development. It can generate images of a surface in various conditions, measure material properties such as mechanical stiffness and adhesion, as well as perform optical analysis of surfaces. It can be used to characterize materials such as semiconductors, metals, polymers, and salts. The tool is also capable of collecting data from multiple wafers simultaneously, making it a useful tool for quality assurance and process control. It can be used for applications such as overlay measurements, defect studies, surface flatness inspection, and measuring the impact of process parameters. LEXFAB-300 is an essential tool for the fabrication and metrology of semiconductor devices. It is designed to maximize throughput and accuracy, making it an optimal choice for research, development and process control.
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