Used CANDELA OSA 5100 #9394284 for sale

ID: 9394284
Vintage: 2001
Optical surface analyzer 2001 vintage.
CANDELA OSA 5100 is a wafer testing and metrology equipment that provides precision measurements and yield analysis for a variety of wafer sizes and processes. Its optical system is equipped with a unique optical vision unit comprised of Automated Pattern Recognition (APR) and ADP (auto defect-detection processing) scan tools and techniques, enabling it to accurately inspect up to 25 wafers from 8" to 13" in diameter. The 4-point non-contact measurement capability ensures accurate measurements, while its high-resolution imaging machine allows for highly detailed analysis. The scanhead includes a unique combined laser lamp and high resolution camera, which enable automated defect detection and analysis. The tool also supports scanning of wafers using Laser Ablation for Detect-Reidentification (LADR) technology. This enables accurate recognition and classification of a variety of laser burn or patterned features, enhancing yield management. The asset also provides wafer map analysis for critical defect count, split and merge, product binning, gain/loss data, and other custom services and analysis. OSA 5100 model performs both hot and cold metrology including layer thickness, CD metrology metrology, reflectivity, resistivity, and leaks detection. The equipment is equipped with an "advanced control" system for automated wafer scanning, which operates in a real-time environment for efficient and accurate scanning of wafers in either a batch or continuous mode. Operators can also manually control the unit to customize testing parameters for different applications and to obtain more precise results. In addition, the machine supports automated Focus Adaptive Scanning/Analysis (FAS/FA) with real-time Wafer Alignment Control, providing laser-scannable optimized focus points for each wafer. This multi-dimensional alignment control program is programmed to meet customer specified criteria, and is based on built-in intelligence, allowing for improved accuracy in laser-scannable wafer metrology. Overall, CANDELA OSA 5100 tool is a reliable and versatile wafer testing and metrology asset which offers a range of features to enhance yield management and achieve consistently precise results. It is an efficient tool for semiconductor wafer fabrication processes and is an important addition to any fabrication lab.
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