Used EPIPLUS / ETAMAX Plato #293802199 for sale
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ID: 293802199
Wafer Size: 2"-8"
PL Mapping system, 2"-8"
HANIL Automatic voltage regulator, 10 kVA
WTR Controller
ATM Robot
Centering unit
DYNAX WTR-TP 330LEDF Teaching pendant
ULVAC DA-40S Vacuum pump
Operating system: Windows 7 Pro
Power supply: 220 V, 40 A, Single phase, 60 Hz.
EPIPLUS / ETAMAX Plato is an advanced wafer testing and metrology equipment for semiconductor manufacturing. This system provides high-precision measurements of device parameters including depth, angle, flatness, etc; it also has integrated components, such as a handler for rapid wafer transport and a vision unit for automated inspection. ETAMAX Plato is a fully automated wafer testing and metrology machine capable of testing a wide range of wafers and part sizes from 200mm to 100mm. It features an automated Handler module for wafer transport and aligning, as well as a vision tool for automated inspection. The Handler is capable of loading and unloading up to ten 200mm Wafers from a magazine, individually or in stacks, and can transport them as well as align them. The vision asset is used to inspect the wafers for defects and other criteria before testing. In addition to the automated components, EPIPLUS Plato also includes ETAMAX metrology model for measuring device parameters. The equipment uses high-precision Sampling Interferometers (SIs) to measure the exact device parameters. EPIPLUS system allows for greater accuracy when measuring parameters such as wafer depth, angles, flatness, and more. Plato is an efficient and effective wafer testing and metrology unit. It is flexible and easy to use, allowing manufacturers to quickly and accurately measure device parameters. The machine is also extremely reliable, providing precise and consistent results. Overall, EPIPLUS / ETAMAX Plato is a highly advanced wafer testing and metrology tool with integrated automation components and precision measuring. It is an essential tool for semiconductor manufacturing and provides reliable and efficient measurements of device parameters.
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