Used EPIPLUS / ETAMAX Plato #9283210 for sale

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EPIPLUS / ETAMAX Plato
Sold
ID: 9283210
Vintage: 2010
PL Mapping system 2010 vintage.
EPIPLUS / ETAMAX Plato is a wafer testing and metrology equipment designed to accurately measure the characteristics of integrated circuit (IC) wafers up to a size of 305 mm. This system is a high-force, multi-axis manipulator that is completely factory calibrated and capable of handling various wafer sizes, thicknesses, and shapes. The powerful and precise motion control utilizes high-resolution optical encoders for precise, smooth, and repeatable movements. ETAMAX Plato unit utilizes a host of sensors to accurately measure and identify any defects on the wafers, such as scratches, cracks, and hillocks. It is capable of measuring a wide variety of parameters, including flatness, thickness, flat slopes, and height variation. Furthermore, the highly efficient machine can measure across multiple wafer lots for increased throughput. The tool also offers integrated features such as automatic Defect Area Characterization (DAC) and wafer corner inspection that can be customized to meet stringent customer requirements. EPIPLUS Plato asset is also able to integrate with a host of other testing equipment, allowing it to capture external data and measuring results for a more comprehensive analysis. In order to ensure the accuracy of the results, Plato model utilizes advanced algorithms and machine vision. The vision equipment is equipped with multiple cameras that can detect changes in the wafer's surface, as well as defects in the pattern of the integrated circuits. Overall, EPIPLUS / ETAMAX Plato wafer testing and metrology system is an ideal solution for IC manufacturers who need a reliable and accurate way to measure and test their wafers. It ensures consistent accuracy and can detect and identify even the smallest of defects with great precision, making it the perfect choice for users who rely on accurate results for their production processes.
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