Used FILMETRICS F50 #9256974 for sale
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ID: 9256974
Wafer Size: 8"
Film thickness measurement system, 8", parts machine
Thickness range: 20 nm - 70 µm
Wavelength range: 380 nm - 1050 nm
Standard wafer reflectance
PC Missing.
FILMETRICS F50 Wafer Testing and Metrology Equipment provides a highly accurate in-situ wafer testing and metrology suite for production monitoring, failure analysis, and research and development. FILMETRICS F 50 combines advanced optics, advanced motion and positioning control, the latest metrology technology, and an intuitive user interface implemented on a ruggedized unit for operation in industry-standard wafer fabrication facilities. At the heart of F50 is FPC (FILMETRICS Process Control) Optical Measurement Technology, which measures key wafer parameters such as step heights, reflectance, polarization, material composition, and other critical features. The FPC system provides extremely accurate data through its advanced optics, which includes a diffraction grating, a fiber optic bundle, and an array of photodiodes. The motion control unit of F 50 provides precise and repeatable stage motions to ensure accurate measurements over a range of wafer sizes and flatness. The entire motion control machine is ruggedized with anti-vibration dampening features to keep vibration to a minimum during motion. FILMETRICS F50 is fully automated and adjustable, allowing process engineers to tune the performance for optimum results during production or R&D. The user can operate FILMETRICS F 50 remotely via its 10.4-inch touch screen/keyboard with a graphical user interface. The user-friendliness of the tool, combined with its precision, results in fewer errors and time savings when collecting data. F50 Wafer Testing and Metrology Asset is a versatile and highly reliable tool for wafer testing and metrology. F 50 focuses on accuracy, repeatability, and robustness, enabling it to provide an in-situ performance assessment of all types of wafers without disrupting the existing process. Equipped with advanced optics, FPC technology, and an intuitive user interface, FILMETRICS F50 provides a simple, reliable, and accurate solution for wafer testing and metrology.
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