Used FOUR PROBES TECH RTS-8 #293624729 for sale
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ID: 293624729
Vintage: 2016
Resistivity measurement system
4-Point probe
Resistivity: 10^-5 - 10^5 Ωcm
Rectangular wafer resistance: 10^-4 - 10^6 Ω
Conductivity: 10^-5 - 10^5 s/cm
Poly diameter:
Type S-2A: 140 mm X 150 mm
Type S-2B: 200 mm X 200 mm
Type S-2C: 400 mm X 500 mm
2016 vintage.
FOUR PROBES TECH RTS-8 is a wafer testing and metrology equipment designed for both horizontal and vertical wafer testing in semiconductor and other related industries. The system is equipped with four probes which make a variety of measurements possible, including layer thickness measurements, contact resistance testing, surface morphology analysis, material composition analysis, device leakage current measurements, etc. It also offers a comprehensive suite of electrical and optical test tools that can be integrated with the four-probe unit. The machine offers a variety of mechanical and operational features. It is equipped with a high precision, four-axis wafer stage that has a travel range of up to 100mm in the x, y and z planes, as well as a tilt range up to ± 10°. The stage can be motor-driven in both horizontal and vertical directions with a full range of velocity control. The probe heads are precisely mounted on slide rails for repeatable and precise sample positioning. It also includes a high-powered glass microscope for sample viewing and alignment. The tool features two independent four-probe measurement cards: a one-channel card for high-precision measurements such as sheet resistance measurements, and a four-channel card for parallel measurements up to a bandwidth of four GHz. Both cards have various signal conditioning functions, such as auto-zero, offset, gain and low pass filter, to enhance accuracy and repeatability. The cards are also capable of controlling up to 16 probes simultaneously, enabling multi-point measurements of small samples. The asset is equipped with a set of high-performance optics for imaging and analysis, including a CCD camera, bright-field illuminators, a polarized microscope and a color imaging model. It also offers real-time sampling rate of up to 50MHz, enabling quick measurements with maximum accuracy and repeatability. The equipment also features a comprehensive Software Development Kit (SDK), including a graphical user interface (GUI), as well as several programmable APIs. The SDK provides extended access to the system's capabilities and allows users to create custom solutions tailored to their project requirements. RTS-8 is a robust and reliable wafer testing and metrology unit designed to meet the most demanding requirements of the semiconductor and related industries. It provides a complete set of tools and capabilities for wafer testing, layer thickness measurements, contact resistance testing, material composition analysis, device leakage current measurements and more. The machine's integrated optics, four-probe measurement cards, real-time sample rate, and comprehensive SDK enable it to deliver accurate and reliable results, allowing users to confidently develop and optimize their products.
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