Used FRT MicroProf TTV200 #293657324 for sale
URL successfully copied!
Tap to zoom
ID: 293657324
Vintage: 2011
Flatness measuring system
Wafer testing and metrology
(2) Chromatic sensors FRT CWL 600 pm
XY Stage: 250 x 200 mm²
Sensor coarse approach
Motorized linear axis
Video view
Granite base plate
Computer and electronics unit
Operating manual
2011 vintage.
FRT MicroProf TTV200 is a wafer testing and metrology equipment developed by FRT GmbH for in-line and engineering purposes. Featuring 4-6 axis wafer stages for full testing coverage, the system provides automated optical, topography, electrical and statistical process control. Compatible with a range of sample types, the unit's single-sided test head allows for measurements to be taken on the front and backside of the wafers simultaneously. The Metrology Core of the machine is powered by a Linewise Scanning Interferometer (LSI) and Triple-axis Vision Sensor - both utilizing Fizeau Interference and provides inspection in the micrometer range. Even heavily structured wafers can be measured with this tool thanks to its configuration. Furthermore, the asset's electrical testing capabilities are complimented by a miniscule 4x4 mm probe card with UHT (Ultra High Throughput) and provides unparalleled testing accuracy. MicroProf TTV200 offers outstanding performance with its Image Processing Unit and open Application Programming Interface (API). The model's open API is a powerful tool for custom applications and provides high potential for further development of the equipment. Its 10 Gigabit Ethernet Image Streaming interface and the Gigalink Flux Streaming interface allows for maximum image capturing speed, ensuring fast tests and clean data transfer. The system also provides optimized wafer mapping for customized application needs.This feature makes use of motorized wafer stages and the RPC (Rotational Path Correction) algorithm. The unit is capable of measuring 80-200 μm lines, and its high-resolution image capturing capabilities make it ideal for measuring seams and other visible features. Finally, FRT MicroProf TTV200 is a comprehensive package featuring numerous other features. The machine provides support for lane-to-lane comparisons and statistics, as well as process optimization and development. With its simple and intuitive user interface, the tool is easy to set up and use, ensuring maximum productivity in wafer testing and metrology.
There are no reviews yet