Used FSM / FRONTIER SEMICONDUCTOR 500 Series #9293061 for sale
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ID: 9293061
System
Used to evaluate the thermal properties
Stability of thin-film in semiconductor
III-V
Solar
LED
Data storage
MEMS
FPD Materials
3D Mapping and profiling included.
FSM / FRONTIER SEMICONDUCTOR 500 Series is an advanced wafer testing and metrology equipment designed to provide precision measurements for semiconductor devices. Its primary uses are to identify and analyze various defects as well as providing a range of solutions to prevent and reduce them. The system consists of a main body, self-sensing stages, sample probe arms and a variety of modules and accessories. The main body of FSM 500 Series is equipped with a motorized XYZ stage, a vacuum unit, an inertia box, a sputter machine, and two sample lifters. The stage has a scanning range of 25 mm x 20 mm, and is capable of handling up to eight wafers, measuring from a 4-inch to an 8-inch wafer. The vacuum tool allows for the secure mounting of the wafer within the device. Additionally, the built-in inertial box allows for accurate sample placement and orientation. The sputter asset then uses noble gas to generate a thin film of oxygen, allowing for optimized testing of the wafer. The arms of FRONTIER SEMICONDUCTOR 500 Series move along the X, Y and Z axes and have a range of movement of 20 mm and 140mm, respectively. They adhere to the design principles of both a dynamic and static compensation preload model to minimize friction. The arms are also equipped with air bearings to reduce surface contact, resulting in less wear and reliable operation. The modules and accessories for 500 Series include quartz processing stations, ion milling systems, and wafer mapping systems. The quartz processing station is used to perform etching, deposition, surface activation, and various other chemical surface treatments. The ion milling equipment allows for precise defect analysis and ion implantation. The wafer mapping system utilizes a precise laser unit to measure the exact location of the wafer. Overall, FSM / FRONTIER SEMICONDUCTOR 500 Series is an advanced wafer testing and metrology machine designed to provide precision measurements for semiconductor devices. With its main body, self-sensing stages, sample probe arms and a variety of modules and accessories, it is capable of quickly and accurately identifying and analyzing various defects in addition to offering solutions to reduce or prevent them.
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