Used FSM / FRONTIER SEMICONDUCTOR FSM 128NT #9257455 for sale
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ID: 9257455
Wafer Size: 8"
Vintage: 2012
Film stress measurement system, 8"
With wafer bow measurement
2D/3D Stress mapping standard
Semi-automated system
With convenient wafer loading and retrieval
2012 vintage.
FSM / FRONTIER SEMICONDUCTOR FSM 128NT equipment from FSM is a fully integrated wafer testing and metrology system designed to automate wafer processing and deliver reliable metrology data for complex device analysis. The unit uses advanced optical technology, advanced metrology techniques, and powerful software algorithms to analyze large-scale wafers with up to 128 independent process steps. The machine also offers an intuitive graphical user interface (GUI) and is capable of handling new process techniques, as well as existing ones. FSM 128NT features a number of advanced technology capabilities such as a dual-beam lithography option, integrated test/metrology with laser, and automated wafer inspection. Its dual-beam lithography allows for precise patterning accuracy, while its integrated test/metrology with laser enables high resolution for device characterization. Furthermore, the tool also includes an automated wafer inspection feature, which automatically detects and isolates defective wafers prior to further processing. The systems advanced optical technology includes a laser diffraction pattern recognition scanner which rapidly images both deposited and undeposited patterns on wafers in real-time. It also features a high-speed laser photomask inspection wafer mapping which is used for accurate probing of critical geometries. The use of digital image processing and high magnification optics further simplify pattern defects detection and critical geometry analysis. FRONTIER SEMICONDUCTOR 128-NT also features three advanced wet bench technologies; a spin coating module, a wet streaking module with integrated surface analysis, and a needle inspection station. The spin-coating module automatically dispenses a layer of wet or dry coating onto the surface of wafers in an automated fashion. The wet-streaking module utilizes high-precision motion and handling technologies that allow for robust surface analysis. The needle inspection station is used to detect needles based on size and pattern recognition at any locations on a wafer. Finally, the asset incorporates powerful software algorithms, which enable process lawyers to set up automated sequences of process steps with a few keystrokes. The software performs in-depth analysis of wafers and provides accurate metrology data, quickly and reliably. It also incorporates a user friendly graphical user interface, which makes it easy for users to set up wafer processes and analyse data. With all of these features, FSM FSM 128NT is an ideal solution for manufacturing facilities requiring reliable results from automated wafer processing.
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