Used HANRA HRI 580L #293635047 for sale

HANRA HRI 580L is an advanced wafer testing and metrology equipment used in the semiconductor industry. It integrates the latest optical, machine vision, and robotic technologies to inspect and process wafer surfaces with high precision and accuracy. The system is capable of measuring various properties such as reflectance, surface flatness, profile, thickness and doping concentrations on a variety of materials used in semiconductor device fabrication. HRI 580L is made of a tool base, a wafer manipulation tool, and an image analysis unit. The tool base is equipped with a rotary positioning stage that is capable of accurate positioning of the wafer and continuous motion up to 1 degree rotation. It also contains the X-Y-Z axes, allowing for precise wafer alignment, as well as a wafer puck to secure and move the wafer. The wafer manipulation tool is used to precisely move and manipulate the wafer over the backscattered electron imaging machine. The image analysis tool includes an optical microscope, fluorescent microscope, and laser interferometer to measure surface flatness, dopants, and surface topography. HANRA HRI 580L provides precision testing, mapping and imaging capabilities. The asset is equipped with a fully-automated calibration, enabling high accuracy measurement and processing. The optical microscope and laser interferometer measure reflectance properties of a wafer surface, while the fluorescent microscope enables imaging of dopant concentrations. The mapping capabilities of the model make it possible to take multiple high-resolution images, allowing for detailed analysis of a wafer's surface and testing for defects. HRI 580L offers data acquisition and analysis capabilities as well. It can acquire and analyze various data from multiple sources, including waveforms, images, and statistical analysis. The user-friendly software enables data synchronization, which is useful for process control. The software can also store data for later use. HANRA HRI 580L is an advanced wafer testing and metrology equipment that provides precise and accurate measurement and processing capabilities. It features an automated calibration system, optical microscope, laser interferometer, fluorescent microscope, and automated mapping. The unit can acquire various data from multiple sources, allowing for detailed analysis and process control.