Used IMS / NANOTECH LVIS-3+ #9314421 for sale

IMS / NANOTECH LVIS-3+ wafer testing and metrology equipment is an advanced and highly precise instrument for characterizing and expediting the evaluation of semiconductor wafer substrates. The system uses a novel combination of laser scanning, optical metrology, and voltage measurement technologies to provide detailed non-destructive mapping of wafer properties in both topography and electrical. IMS LVIS-3+ is designed to test and characterize wafers for various applications such as the fabrication of microelectronic devices, micro-systems and sensors. In particular, the unit is designed to analyze processes such as photolithography, oxidation, diffusion, deposition and etching as well as structural defects and contaminations. The machine is suitable for a wide range of materials including III-V semiconductors, silicon on insulator (SOI), silicon nitride, aluminum, and other deposited and etched structures. NANOTECH LVIS-3+ employs a high-resolution laser scanning microscope (LSM) which is capable of measuring surface topography and electrical properties with a spatial resolution of 0.07µm. It enables the characterization of various processes and parameters including contact area, voids, grain size, surface contamination and uniformity. The tool is outfitted with a high-resolution white light interferometer which is used for measuring step heights and inspecting film thickness. The asset is also integrated with voltage probes and a voltage monitor, allowing for measurement of electrical circuits, contact resistance, and monitoring of current leakage or shorts. LVIS-3+ is highly efficient and is capable of examining up to 15 sites simultaneously. Furthermore, the model is designed with automated throughput in mind and offers several automated analysis and editing features. This allows for quicker and more comprehensive evaluations of wafer characteristics. Additionally, the equipment offers an intuitive graphical user interface for programming and operating the system, making it easy to setup and use for both experienced and inexperienced users. In summary, IMS / NANOTECH LVIS-3+ is a powerful and sophisticated wafer testing and metrology unit designed for providing reliable and comprehensive characterization of wafer substrates. It enables the evaluation of film thickness, topography and electrical properties with high accuracy and high efficiency. The user friendly and automated features make it suitable for both experienced and inexperienced users.