Used INSPECTROLOGY IVS-165 #9390277 for sale
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ID: 9390277
CD Measurement system
LEICA 020-654.113-000 UV365 Microscope
Objectives:
PL Fluotar 5x/0.12
PL Fluotar L50x/0.55BD
Plan 20x/0.40.
INSPECTROLOGY IVS-165 is a wafer testing and metrology equipment designed to provide accurate, high throughput measurements for advanced semiconductor technologies. Utilizing a modular, non-destructive testing method, the system is capable of delivering precise test results with minimal sample damage. This wafer testing and inspection unit features a patented XY/Θ stage design combined with advanced optics and advanced image processing techniques. Highly accurate, four-axis wafer movement is realized through the combination of the XY/Θ stage and air bearing positioning technology. When combined with objective lenses and illumination sources, it can measure the width, height, and depth of sample features with precision up to 1.5 μm. Additionally, the high-speed motion allows up to 1,000 imaging cycles per second for fast measurements of IC elements. IVS-165 machine enables inspection of different types of semiconductor wafers such as SOI and MEMS. It is ideal for applications such as wafer mapping, wafer defect analysis, and product quality assurance. When used for the characterization of MEMS devices, the tool is able to measure and analyze individual layers and their features with a resolution of up to 1 μm. It is also capable of imaging and analyzing structures such as line widths, contact holes, alignment marks, and even 3D structures up to 1.5 μm. For error and process monitoring, the asset is able to detect minor defects, including pitting and voids measuring up to one half of a micron. INSPECTROLOGY IVS-165 model comes with a complete set of software tools for convenient image analysis and fault monitoring. The software suite allows users to access real-time measurements, robust reporting, and post-test data analyses. The tools can perform automated defect characterization, image comparison, and fault recognition. Additionally, the software has features such as batch processing, quality control reports, and analysis of specific measurements. IVS-165 is a highly versatile and reliable wafer testing and metrology equipment designed to meet the demands of semiconductor manufacturing. With its powerful imaging and motion capabilities, the system is able to provide fast and accurate measurements with low sample damage. The bundled software tools make it an ideal platform for defect testing, process monitoring, and product quality assurance.
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