Used KLA / TENCOR 0266951-001AA #9401899 for sale
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KLA / TENCOR 0266951-001AA wafer testing and metrology equipment is a highly advanced system designed to deliver repeatable, high-accuracy measurements at the nanometer level and faster. The unit combines a host of hardware, software and calibration tools to deliver detailed surface and foreign material analysis of integrated circuits (ICs) in wafer form. The hardware portion of the machine consists of an active wafer stage that allows up to five wafers to be loaded at once, an automated alignment tool, plus an integrated dimensional measuring instrument (microscope) and dual digital video cameras. The software portion includes an image acquisition module, an integrated image analysis module, and an automated report generator. The automated alignment asset includes a vacuum pickup tool and a motorized sample holder that works together to ensure precise, repeatable positioning of the wafers and any other objects loaded onto the wafer stage. The microscope enables the operator to inspect devices at extremely close range, with resolutions up to 40X, for surface defects and other anomalies. The dual digital video cameras enable the operator to review images at up to 1000X. The image acquisition module acquires images in a wide variety of formats, including monochrome, RGB, YUV, and several others, and allows the operator to set and adjust gain, luminance, and offset values. The image analysis module measures device size, shape and placement, as well as calculates any defects. The automated report generator collects, aggregates and compiles data in an Excel compatible report. KLA 0266951-001AA is designed for the most exacting measurements, with the capability to measure down to nanometer levels, up to 20 million or more points per wafer, and with 2 sigma repeatability accuracy. The model is a powerful and dependable tool for quality control and analysis of ICs and other devices in wafer form, making it an invaluable asset for any manufacturer or research facilities.
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