Used KLA / TENCOR 2.1 Surfscan #9239243 for sale
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KLA 2.1 Surfscan is a wafer testing and metrology equipment for superior monitoring and batch-wide diagnosis of critical semiconductor device structures. It is one of the highest resolution metrology solutions for detecting and characterizing defects in semiconductor wafers. The system is built on a proprietary surface technology engine and utilizes advanced algorithms for defect detection, resulting in a high-accuracy performance. It offers users the ability to accurately analyze a variety of measurements such as critical dimensions, image, surface roughness, integrated device features, and localized surface mapping. It supports a wide variety of applications for measuring complex devices and features, including 3D surface inspection and wafer probing for manufacturing yield and reliability. The unit's intuitive user interface is easy to use, allowing users to quickly design, control and execute measurement sequences. It also enables users to customize analysis parameters to optimize the performance and accuracy of their detectors. Surfscan supports selectable imaging technologies to accommodate site-specific process requirements, including direct imaging, fourier transform infrared (FTIR), X-ray imaging, and edge-emission microscopy (EEM). Additionally, the machine offers imaging with deep UV capability, enabling users to detect nanometer-scale defects that are otherwise difficult to measure with traditional optical technologies. It also incorporates advanced non-contact measurement techniques suitable for in-line or on-site metrology, eliminating the need for manual measurements. The tool supports a range of industry-standard data formats for seamless integration with existing data systems. It comes with an integrated report generator and a comprehensive suite of image acquisition and analysis tools for detailed measurements and data analysis. Overall, TENCOR 2.1 Surfscan is the ideal asset for fast, accurate and reliable wafer measurement and metrology. It provides the highest levels of accuracy, speed, and flexibility, making it the perfect solution for semiconductor device and process characterization and defect diagnostics.
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