Used KLA / TENCOR 365 UV #9353977 for sale
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ID: 9353977
Vintage: 2000
Defect inspection system
INTERNOVA ICLS-RTX Mask aligner
SMIF
Main body:
MLS
Robot arm
Robot and controller
Stage
COHERENT i-Line laser
He Ne Laser
Optic module
Board
Facilities module:
Heater exchanger
COHERENT i-Line laser controller
Power supply
With KLA 60 (KLA 50):
Board
PC Monitor
Board power supply
IC Board
2000 vintage.
KLA / TENCOR 365 UV is a state-of-the-art wafer testing and metrology equipment designed to analyze a wide variety of semiconductor devices and nanostructures. The system features a high-resolution, four-way-motion advanced optical microscope capable of providing nanoscale imaging of microelectronic components. It integrates multiple detectors (probe, UV photomultipliers, and imaging) into the optical microscope unit, and can measure various physical, electrical, and chemical properties of the wafers. Additionally, it includes a proprietary autofocus algorithm for precision focusing and 3D depth of field control. This machine possesses industry-leading accuracy and sensitivity. It is capable of performing CD-SEM imaging and measurement at nanoscale resolution, providing users with greater insight into nanoscale fabrication processes and potential defect detection. With a wide range of automated parameter settings, KLA 365 UV is optimized for use in research and development, production, and quality assurance settings. TENCOR 365 UV tool is built with an intuitive user interface, allowing for optimized workflow and efficient operation. A variety of tools are integrated to maximize productivity, including a Smart Reports feature to generate custom reports to fit user requirements. The asset is compatible with leading software packages, and has a range of data export formats for seamless collation and sharing of results. In addition to its superior performance, 365 UV also provides a robust and robust safety design. The model includes a safety light curtain and digital I/O protection to ensure that all users are protected from hazardous radiations and the risks of electrocution. Additionally, KLA / TENCOR 365 UV is in full compliance with ISO and TUV standards and has passed several stringent safety tests. KLA 365 UV is an extreme-throughput wafer testing and metrology equipment that provides users with the most accurate results and the highest degree of safety. This versatile system allows for quick and effortless analysis of all types of semiconductor devices and nanostructures to ensure the highest quality and most reliable devices can be produced.
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