Used KLA / TENCOR 4000 SURFSCAN #9205755 for sale

ID: 9205755
Wafer Size: 6"
Unpatterned wafer inspection system, 6".
KLA / TENCOR 4000 SURFSCAN is an advanced wafer testing and metrology equipment, designed to provide precise topographical measurements of wafers used in the semiconductor industry. The SURFSCAN system utilizes spindle-motor driven stages to perfectly align and move the wafer around, while highly advanced metrology algorithms are used to accurately measure the wafer's topography and shape. SURFSCAN's advanced optics unit includes an illuminated inverted microscope, 4 Digital signal processors, an LED illumination, which enables the microscope to accurately detect and measure the surface defects. A stainless steel reference sphere is used to ensure the accuracy and consistency of the measurements. The SURFSCAN features an advanced, high-speed CCD camera, along with a strobe illuminator to capture detailed images of the wafer surface, during the measuring process. It has a variable scan rate, which can be tailored to the wafer's size and the specific requirements of the application. Wafer topographic data is stored in memory and can be sent or shared with other devices. The metrology algorithms featured in the SURFSCAN enable comprehensive surface analysis in a fraction of the time typically needed for manual measurements. The machine can provide detailed analysis of standard parameters such as root mean square (RMS) roughness, peak-to-valley roughness, and line widths. The SURFSCAN is easy to use and maintain. It features advanced user interface capabilities, which allow for easy navigation and control of all parameters, from scanning speed to measurement modes. The fully automated operation requires minimal operator intervention, and automated calibration procedures are used rapidly calibrate the tool for precise, repeatable results. KLA 4000 SURFSCAN is a highly precise and advanced wafer testing and metrology asset. Its advanced optics model and advanced metrology algorithms enable accurate and reliable topographical measurements of wafers. It's fast, efficient, and easy to use and maintain, making it the perfect choice for assessing the quality of wafers used in the semiconductor industry.
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