Used KLA / TENCOR 4500 SURFSCAN #293605541 for sale

ID: 293605541
Vintage: 1987
Wafer inspection system 1987 vintage.
KLA / TENCOR 4500 SURFSCAN is a wafer testing and metrology equipment that is ideal for use in semiconductor fabs and other wafer-intensive environments. This system provides a unique capability for surface morphology analysis and film thickness measurements, enabling Process Engineers and Yield Management personnel to quickly and accurately gain insight into their product quality. KLA 4500 SURFSCAN, which is based on the highly successful 4500 platform, offers a non-destructive optical surface measurement unit, designed specifically for characterizing the entire surface of a test wafer. This machine measures the surface profile and parameters such as step height, roughness, bow, and twist with a depth resolution better than 1 nanometer. The tool also has the ability to measure film thickness of up to 400 nm on photoresists and metals, as well as oxide and nitrides. TENCOR 4500 SURFSCAN was designed to be highly user-friendly with dedicated operations and quality assurance modes. The seamless integration of the user control software and the wafer metrology asset simplifies the operations without sacrificing accuracy and performance. It offers a wide variety of user feedback options to help optimize process parameters in real-time. This includes real-time SPC trending data and visuals, on-wafer measurements, and automated process algorithms. In addition to the model's performance, 4500 SURFSCAN was designed for optimal reliability and repeatability. The equipment is temperature and vibration tolerant, with a robust design for superior long-term performance. It also provides active monitoring and diagnostics to prevent any wafer-measurement errors, and has built-in calibration routines to guarantee accuracy. KLA / TENCOR 4500 SURFSCAN is a powerful system that combines an impressive combination of design precision, accuracy and reliability. Process engineers and yield management personnel have access to an intuitive interface to quickly and accurately gain insight into their product quality. This unit is the perfect solution for any wafer intense scene, providing high performance, reliable results, and a cost-efficient way to optimize process parameters and gain product quality insight.
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