Used KLA / TENCOR 4500 SURFSCAN #293627875 for sale

ID: 293627875
Wafer Size: 4"
Wafer inspection system, 4" Process: GaAs.
KLA / TENCOR 4500 SURFSCAN is a sophisticated metrology and wafer testing equipment for semiconductor manufacturers. It is used to measure, analyze and assess production wafers for critical dimensions such as thickness, surface flatness, and step height. The system is designed to provide real-time feedback to operators and engineers in order to maintain wafer quality and ensure tight process control. KLA 4500 SURFSCAN uses advanced microscopy techniques to perform high resolution 3D analysis of surfaces. It utilizes a Piezo scanner for fast and accurate positioning, as well as a bright white light source to illuminate the sample. This enables sub-nanometer resolution when measuring and assessing sample features. The unit is capable of detecting and measuring features as small as 200nm. TENCOR 4500 SURFSCAN is able to generate several different types of wafer maps and topographic data. These include a basic map which shows the surface of the sample as a whole, along with detailed maps of finer irregularities and 3D surface profiles. This makes it easy to locate and identify areas of highest risk or concern. The machine also features a range of statistical analysis tools which enable users to quickly generate data such as CD statistics, auto-focus binning and wafer grade maps. This data can be used to compare wafers against a set CD uniformity specification and identify outliers. 4500 SURFSCAN tool is able to save and export data for further analysis or quality control. The asset can also be used to generate live 'alerts' when outside parameters are met, such as when a feature exceeds a certain threshold. This provides near real-time feedback, allowing manufacturers to take immediate corrective action if necessary. In summary, KLA / TENCOR 4500 SURFSCAN is a powerful tool that can be used to measure and inspect wafers with extreme accuracy in order to ensure tight process control and wafer quality. The model is capable of generating detailed data sets, mapping features and abnormalities, as well as exporting data to third-party analysis tools or quality control systems.
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