Used KLA / TENCOR 4500 SURFSCAN #9167686 for sale

KLA / TENCOR 4500 SURFSCAN is a robust wafer testing and metrology equipment designed for a variety of advanced semiconductor process applications. The powerful tool provides high-speed analysis of wafer topography and defect detection for improved chip performance. This automated system utilizes advanced analytics and imaging to quickly identify and characterize surface features such as small parametric defects, particle contaminants, and roughness. KLA 4500 SURFSCAN is equipped with several specialized stationary optics that can perform simultaneous testing of up to four test samples. It has a high dynamic range optical assembly that provides a depth resolution of up to 25nm, and a wide field of view that allows for fast and accurate analysis. This testing unit is ideal for measuring electrical, optical, and mechanical properties of wafers for improved reliability and performance. The Surfscan 4500 features automatic enclosure control; a fully automated edge detection machine; multiple incidence angles including twillight and phase shift illumination; high-speed, high-resolution imaging; automated defect sizing; and automatic defect classification. This software package also includes an extensive analysis library which includes CD-SEM, WFE-OV, XT, CD-TOPO, AF-MAP, OV-WFE, and X-TEEM to help detect and characterize both surface and subsurface defects. In order to confirm defects, the Surfscan 4500 can be connected to a variety of secondary testing systems, including scanning electron microscopes, atomic force microscopes, or automated optical inspection systems. The 4500's software is also designed to report data which can be used in trend analysis for advanced process control. The data generated by the tool can also be linked to historical data from previous analysis runs to easily monitor various changes in process parameters. The Surfscan 4500 is a reliable and durable asset that is built with modular construction for easy maintenance and I/O connection. With its advanced analysis technologies and automated testing capabilities, this efficient model is an essential tool for automated wafer testing and metrology.