Used KLA / TENCOR 4500 SURFSCAN #9363455 for sale
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ID: 9363455
Wafer inspection system
Surface contamination: 2"-6"
Detects particles: 0.2µm
Automated cassette to cassette
Haze measurement and seven level haze map
Un-patterned wafers
Repeatability: 1% at Standard deviation
Resolution: 0.2µm
Substrate material: Opaque, polished surface that scatters < 5% incident light
Substrate thickness: 0.3 - 0.75 mm
Substrate size, 3"-6"
Throughput: 150 mm diameter for 30 seconds per load.
KLA / TENCOR 4500 SURFSCAN is an advanced wafer testing and metrology tool designed for production-level wafer inspection and characterization. With its patented technologies, KLA 4500 SURFSCAN can handle up to 5-inch wafer measurements at high throughput. It is rigid and flexible enough to adapt to the customer needs, while still providing fast, accurate, and reliable results. TENCOR 4500 SURFSCAN offers a comprehensive suite of automated wafer testing and metrology capabilities. Its advanced test and analysis options include defect-defining means such as topography, film thickness, texture, composition, stress, crystal orientation and other semiconductor properties. The system also offers automated feature recognition, enabling rapid detection and analysis of anomalous features on the wafer surface. 4500 SURFSCAN uses highly advanced imaging technologies to capture both constant-field and constant-force images, with up to 5 picometer of resolution. Using its powerful image processing algorithms, the system can detect even submicron level features across the entire wafer surface. This enables wafer metrology at all stages of the process, ensuring that all steps of the process are accurately monitored and tested. In addition, KLA / TENCOR 4500 SURFSCAN is equipped with a powerful software package which enables operators to analyze measured results. It provides a wide range of visualization, data processing, and statistical analysis functionalities that are essential for rapid and accurate wafer inspection and characterization. KLA 4500 SURFSCAN is designed to support semiconductor manufacturers in their quest for defect-free production processes. As one of the leading metrology tools in the market, it guarantees reliability and accuracy, while still respecting the customer's cost constraints. The system offers an excellent blend of automated wafer metrology capabilities and cost-efficiency, making it the ideal choice for production-level wafer testing and characterization.
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