Used KLA / TENCOR 4500 #293630338 for sale

KLA / TENCOR 4500
ID: 293630338
Wafer inspection system.
KLA / TENCOR 4500 is a high-precision wafer testing and metrology equipment designed to manage advanced quality control and process monitoring for semiconductor device manufacturing. This system utilizes accuracy, versatility and speed to produce efficient, reliable and repeatable analyses of wafer defects, parametric performance and process uniformity. KLA 4500 is composed of several components, including a probe station, an optical head, a quality assurance solution and a measurement station. TENCOR 4500 probe station is used to access, measure and sample individual devices on the wafer during a scan. It consists of an XY or "Directional" stage and a Z-axis probe displacement mechanism that enable precise positioning and accurate measurements to take place. Connectivity between the probe station and other components is provided via a flexible cable unit, while a robotic arm is used to manipulate wafer and die positions. The optical head is a key component in the functionality of 4500. It is fitted with a variety of microscope objectives, allowing magnification of etched devices, specific regions of interest and the whole wafer. High-precision optical inspections result in increased defect detection, width measurements with the 35μm accuracy and more. Imaging is completed with high resolution, full-featured and HD cameras, giving users an impressive range of options to choose from. KLA / TENCOR 4500's quality assurance solution enables automatic defect detections, defect classification, wafer image analysis and the use of algorithms to process collected data. The measurement station is used to post-process scanned data and is able to store images, provide statistical analysis and track performance trends. This machine clocks in at a throughput of 175 wafers-per-hour, effectively enabling minimal downtimes and increased device quality for production lines. It is designed for efficiency and ease of use, with features like an intuitive user interface, automated routine operations, and a variety of customization options. Together with its reliability and quality, KLA 4500 is the ideal wafer testing and metrology tool for modern semiconductor device manufacturing.
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