Used KLA / TENCOR 4500 #293662761 for sale

KLA / TENCOR 4500
ID: 293662761
Wafer Size: 6"
Wafer inspection system, 6".
KLA / TENCOR 4500 is a highly advanced wafer testing and metrology equipment designed to measure electrical, optical and physical properties of semiconductor wafers. The system utilizes the new KLA Advanced Pattern Detection Unit (APD) which allows for a more accurate and reliable metrology. This machine is equipped with an automated single-wafer AFM stage, giving higher resolution images even on small structures. It also includes scanning electron microscopy and time-resolved spectroscopy for chemical analysis, yielding highly accurate results. KLA 4500 provides a wide range of measurement capabilities for electrical, optical and physical properties at the wafer level, including critical dimension metrology (CD), line width roughness (LWR), overlay metrology, film thickness metrology, stress and photoluminescense (PL) measurements. All these measurements are supported by a high-resolution built-in photoresist scanner. The scanner can also be used for defect inspection to detect even the smallest defects and their impact on the performance of the wafer. The tool also boasts advanced software tools for data analysis and optimization. The Advanced Pattern Detection (APD) software provides improved accuracy and repeatability of data analysis and control, as well as a faster wafer cycle time. TENCOR Pattern Inspector software is used to discover and characterize defects, measuring their size, shape and impact. The asset also features a research module, allowing detailed studies of the properties of materials like insulators and semiconductors. TENCOR 4500 has a large workspace, allowing up to eight wafers to be loaded at once and can measured wafers up to 300 mm. This model is ideal for large-scale production operations, due to its exclusive combination of speed, accuracy and repeatability. This equipment is designed to meet the most stringent safety and environmental standards, and is compliant with the latest industry standards. 4500 is an incredibly powerful system, offering precision measurements, accurate analysis and high-speed data processing to reduce costs and maximize performance. With its broad range of capabilities and advanced software tools, it is the perfect unit for detailed wafer testing and metrology.
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