Used KLA / TENCOR 50-0002-03 #199615 for sale
Tap to zoom
KLA / TENCOR 50-0002-03 is a wafer testing and metrology equipment that provides advanced defect detection capabilities to semiconductor manufacturers. KLA 50-0002-03 system contains features including automated wafer identification, wafer edge data collection, optical inspection, electrical metrology, overlay registration, and site-to-site/cross-site comparison capabilities. With the automated wafer identification feature, the unit can accurately identify the correct wafer and generate an inspection set-up accordingly. The wafer edge data collection feature collects edge data for 10mm and 3mm sites for alignment and focus stability. The optical inspection feature provides 3D static and dynamic defect detection capable of a wide range of defect sizes. The electrical metrology feature measures a wide range of electrical parameters including sheet resistance, contact resistance, capacitance, and conductance. Additionally, the machine can measure delta resistance, leakage current, breakdown voltage, and thresholds for dynamic electrical tests. The overlay registration feature of TENCOR 50-0002-03 allows users to measure wafer alignment and overlay control during metrology, wafer handling, and exposure processes. The site-to-site/cross-site comparison capabilities allow defect inspection and electrical measurements to be done simultaneously during manufacturing processes and compared with a standard, known as "reference sites." User-defined inspection parameters such as acceptable defect rates, size thresholds, and pass/fail criteria can be entered into the tool for each test. Additionally, inspection data can be stored in a database for statistical analysis. In summary, 50-0002-03 is a wafer testing and metrology asset with automated wafer identification, wafer edge data collection, optical inspection, electrical metrology, overlay registration, and site-to-site/cross-site comparison features. These features give users the capabilities to measure and compare a wide range of electrical parameters, detect and size defects, and store results for statistical analysis. The model is ideal for semiconductor manufacturers looking for an advanced defect detection and metrology equipment.
There are no reviews yet