Used KLA / TENCOR 5000 Surfscan #64216 for sale
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KLA / TENCOR 5000 Surfscan is a wafer testing and metrology equipment that provides fast, precise image analysis, allowing for high-resolution inspection of devices on processed wafers. The imaging system utilizes an advanced design consisting of a motorized XY stage, CCD camera, and sensitive illumination. The unit acquires images at up to seven times the speed of conventional static systems and provides extreme sensitivity for defect detection and characterization. The fast scanning of the automated stage is powered by an innovative motorized control machine and the high-speed image acquisition makes possible in-depth analysis of wafer topography. KLA 5000 Surfscan is optimized for metrology and process monitoring applications, and is capable of performing measurements of critical structures, dimensioning and sizing of defects, as well as image-based sorting and defect isolation. The tool features high sensitivity and resolution, with a resolution of 1 micron per pixel and no need for sub-pixel resolution. This allows for highly precise measurement, allowing for fast and accurate monitoring and repair of process variations. The asset is delivered complete with a full suite of operators, analysis and measurement tools as well as an image database and statistical analysis capabilities. It is capable of analyzing a variety of device topography data such as surface lifetimes and rms roughness and provides powerful capability to display data in a variety of formats. The intuitive and easy-to-use user interface makes it easy to perform inspection tasks quickly and accurately. TENCOR 5000 Surfscan boasts industry-leading sub-pixel accuracy and defect heading, meaning that it can inspect various patterns of complex features requiring high accuracy, such as V-grooves, contact holes, dielectric layers and more. Additionally, the advanced programmable metrology and analysis software allows for precise characterization of defects. This is specifically designed to improve yield, accelerate process development and reduce wafer loss, making 5000 Surfscan the ideal wafer testing and metrology model for semiconductor and electronic device manufacturers.
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