Used KLA / TENCOR 5000 Surfscan #9284003 for sale

KLA / TENCOR 5000 Surfscan
ID: 9284003
Inspection system.
KLA / TENCOR 5000 Surfscan is an advanced wafer testing and metrology platform designed for use in modern semiconductor processing. It is capable of providing high speed measurement of surface topography. The equipment offers superior measurement accuracy, throughput, and flexibility, allowing users to achieve unprecedented productivity in wafer testing and metrology. The Surfscan is built upon an advanced modular architecture that allows users to customize the system to their specific requirements. It has a wide range of features and options, including multiple measurement stages, a variety of advanced detectors, drives and measurement algorithms. These features allow for the testing of various types of substrates, including silicon wafers, glass and ceramics. The unit is equipped with advanced measurement capabilities such as interferometry, confocal microscopy, and surface profilometry. Interferometry allows for accurate measurement of surface topography, while Confocal microscopy is used to detect subtle height variations such as step height and recessed area width. Surface profilometry is used for the analysis of wafer flatness and provides results with high resolution. The machine is also equipped with a high-precision stepping motor, enabling high-speed scanning of the substrate to produce detailed images of the surface structure. Additionally, the Surfscan is capable of measuring defects such as particles, particles edge roughness, edge hillocks and grooving, and others. The advanced software package accompanying the Surfscan is designed for full data visualization and analysis of wafer flatness and defect characterization. It can detect and measure a large variety of parameters that may be of interest to users, including wafer bow, thickness registration, critical dimension (CD) mapping, defect counts, particle size, non-uniformity, and much more. The tool is built upon a highly reliable platform and features excellent user-friendliness. It is equipped with a modern user interface that allows users to quickly access all the features and functions of the asset. In addition, the model is easy to configure and troubleshoot. KLA 5000 Surfscan is an industry-leading wafer testing and metrology platform that provides high-precision measurements and excellent throughput. It is customizable, feature-rich, and provides superior performance in wafer testing and metrology.
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