Used KLA / TENCOR 5011 #9226125 for sale

ID: 9226125
Wafer Size: 6"
Overlay precision measurement system, 6".
KLA / TENCOR 5011 is a highly accurate wafer testing and metrology equipment that is used for wafer analysis and defect finding. This metrology system utilizes a combination of scanning electron microscopy (SEM) technology and powerful optical imaging techniques to capture highly detailed measurements and photos of the entire wafer surface. KLA 5011 offers complete wafer analysis and defect inspection in a single metrology unit. TENCOR 5011 utilizes a proprietary wafer transport machine that is designed to maneuver every wafer surface through the tool. This transport asset is designed to accurately and precisely transport silicon wafers across the SEM imaging and optical imaging systems without causing damage. Once the wafer is in position, the model is able to perform two-dimensional (2D) edge scans, three-dimensional (3D) imaging, contactless step heights, wafer step heights, and resistivity measurement. 5011 is optimized for high accuracy and speed, allowing for a wide range of wafer analysis and defect detection. The equipment is capable of detecting and identifying defects such as dislocations,process variations, and particle contamination, all in a single automated platform. Additionally, the system is also able to detect print through defects, stage problems, inlaid lines, morphological features, resistivity fingerprints, and various other wafer characteristics. The optical imaging component of KLA / TENCOR 5011 is capable of delivering extremely high resolution images of wafer surfaces. This allows for the identification of defects and characteristics that would otherwise be impossible to detect. The optical imaging unit is also configured to detect defects in dark field modes, allowing for clear contrast detection. In addition to the wafer testing and metrology functions, KLA 5011 also offers a comprehensive set of data analysis and sorting tools. This feature provides users with the capability to quickly and easily sort data to prioritize inspections, flag defects, and determine yield impact from calculations and statistical analysis. TENCOR 5011 is a powerful and reliable machine that is capable of providing highly accurate and reliable wafer testing and metrology results. This tool is designed to provide extended coverage across a wide range of wafer sizes and processes, and is capable of delivering the highest precision and fastest throughput available in the wafer testing and metrology field.
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