Used KLA / TENCOR 5100 XP #293629138 for sale

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ID: 293629138
Overlay measurement system.
KLA / TENCOR 5100 XP is an advanced wafer testing and metrology equipment designed with the most up-to-date technology to deliver unparalleled accuracy and accuracy in wafer-level analysis and testing. KLA 5100 XP features a versatile, high-precision imaging platform, supported by integrated software solutions to streamline workloads and speed up testing and analysis. TENCOR 5100XP includes a high-resolution Reticle Patterned Illumination (PIT) that provides precise pattern recognition and verification of printed wire banks and devices. The innovative Stacked Wells illumination technique further enhances analysis capability with its ability to detect even microscopic variations in rotations and skew angles of test structures. In addition, an advanced Multi-layer Reticle (MLR) scanning system can scan large areas with greater speed and accuracy. 5100XP also offers a fast high-sensitivity detection mechanism, resulting in significantly improved test throughput. This enables users to quickly acquire circumscribed data and carry out rapid defect analysis and identification. Moreover, the unit boasts comprehensive metrology capabilities, including Wafer Type Recognition (WTR), Particle Counting (PC) and Image Capture (IC). Additional measurements such as wafer curvature, lift-off and 3-dimensional critical dimension (CD) measurement can also be supported with the addition of a CD-SEM module. KLA 5100XP can process a variety of substrates, including silicon, glass and plastic wafers, as well as MEMS-variant substrates, to ensure optimal metrology results. With its large throughput capacity, intuitive interface and automated systems, KLA / TENCOR 5100XP requires minimal operator training and delivers consistent, repeatable performance in production-line environments. In addition, it provides advanced machine upgrades, including an Automated Defect Review software package and an additional large-area scan module. These additional features improve efficiency and increase throughput with minimal cost and effort. Overall, TENCOR 5100 XP is an advanced wafer testing and metrology tool that offers a reliable platform for demanding applications. Its advanced features enable quick and accurate analysis of multiple substrates, guaranteeing industry-leading accuracy and repeatability to enable efficient wafer-level analysis at all stages of the testing process.
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