Used KLA / TENCOR 5100 XP #293727707 for sale

Overlay measurement system, 8" Wafer loader system: Transport system: (2) Cassette loader / unloader Pre-alignment: OF Detection function Control console: Menu terminal Image display terminal 5501 Analysis station DEC VLC 4000 RAM: 16 MB QIC Tape drive: 320/525 MB Floppy Disk Drive: 3.5" Image hard copy Printer SECS Patlite Hard Disk Drive (HDD): 2 GB Wafer thickness: 725 µm Minimum die size: 3 mm Maximum die size: 50 mm Measurement throughput: <85 Sheets / hour Clean dry air: Flow rate: 84.9 l/min Pressure 603 kg/cm² - 7.7 kg/cm² Tube, 1/4" (3) Vacuums: Hg: 635 mm Flow rate: 28.3 l/min Tube, 1/4" Exhaust: Duct system: 14.5" Flow rate: 250 cfm Missing parts Temperature: 19°C - 25°C Power supply: 200 VAC, 20 A, Single phase, 50/60 Hz 1996 vintage.