Used KLA / TENCOR 5100 XP #293727708 for sale
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ID: 293727708
Wafer Size: 8"
Vintage: 1996
Overlay measurement system, 8"
Wafer loader system:
Transport system: (2) Cassette loader / unloader
Pre-alignment: OF Detection function
Control console:
Menu terminal
Image display terminal
5501 Analysis station
DEC VLC 4000
RAM: 16 MB
QIC Tape drive: 320/525 MB
F.D Drive: 3.5"
Image hard copy
Printer
SECS
Patlite
Hard Disk Drive (HDD): 2 GB
Wafer thickness: 725 µm
Minimum die size: 3 mm
Maximum die size: 50 mm
Measurement throughput: <85 Sheets / hour
Clean dry air:
Flow rate: 84.9 l/min
Pressure 603 kg/cm²-7.7 kg/cm²
Tube, 1/4"
(3) Vacuums:
Hg: 635 mm
Flow rate: 28.3 l/min
Tube, 1/4"
Exhaust:
Duct system: 14.5"
Flow rate: 250 cfm
Temperature: 19°C-25°C
Power supply: 200 VAC, 20 A, Single phase, 50/60 Hz
Missing parts
1996 vintage.
KLA / TENCOR 5100 XP is a state-of-the-art wafer testing and metrology equipment designed for semiconductor manufacturers. This system enables efficient and accurate testing and probing of wafers to detect defects and other process irregularities. The unit features a large field of view, allowing for quick visualization and inspection of wafer surfaces with tremendously high resolution. Making use of unique optical configurations, KLA 5100 XP is able to capture and measure data points up to 15 μm in size, enabling in-depth analysis of micro and nanostructures. In addition, the machine's FPD (Fringe Pattern Detection) tool utilizes advanced signal processing algorithms to analyze microstructure and fringe patterns to detect even the most subtle of structural defects. A wide range of measurement capabilities are available, including overlay and ESCp analysis, surface morphology analysis, etch depth, shape and roundness and trace analysis. Additionally, the tool comes with a customizable graphic dashboard to support decision making. The asset is equipped with a high-speed wafer handling model, able to accommodate wafers with both flat and beveled surfaces. An ergonomic design makes for efficient and effortless operation, and the curved viewing base creates a comfortable working environment for operators. A built-in safety mechanism precludes the accidental breakage of fragile wafers. TENCOR 5100XP is optimized for both production and research environments, facilitating easy integration into existing processes. Its easy-to-understand interface and intuitive graphical command set allow for effortless operation and data interpretation, which combined with streamlined and flexible workflow capabilities, make the equipment ideal for both experienced and novice users. Overall, KLA 5100XP is a comprehensive wafer testing and metrology system ideally suited to serve the needs of the semiconductor industry. It offers unparalleled precision and reliability, backed by a suite of advanced features, to deliver accurate and valuable information.
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