Used KLA / TENCOR 5100 XP #9145531 for sale
Wafer Size: 8"
Overlay measurement system, 8" 1999 vintage.
KLA / TENCOR 5100 XP is an advanced wafer testing and metrology equipment designed for maximum productivity and throughput in a broad range of applications, such as semiconductor wafer testing, yield analysis, and advanced defect and contamination control. KLA 5100 XP incorporates an automated system which allows it to integrate and coordinate various stages of wafer testing, including sampling, defect profiling, wafer mapping and metrology. It also offers an optional advanced metrology unit designed specifically for demanding semiconductor applications. TENCOR 5100XP employs an array of technologies, such as a unique up-down wafer aligner, laser interferometer, and a wafer Inspection Imaging Machine (WIIS). This tool is extremely versatile and capable of providing detailed insight into defect location, size, and type. The WIIS tool is highly sensitive and capable of capturing images of surface and subsurface defects, helping to improve yields, and reduce the cost of production. KLA / TENCOR 5100XP also has a number of built-in analytical tools, such as a statistical defect analysis, optical line edge roughness measurement, and a real-time 3D wafer map. KLA 5100XP has been designed to provide operators with a range of features for improving inspection and measurement accuracy. It can be configured with a wide range of automated wafer mapping and metrology software options, such as a support software module and the powerful QMet measure. The asset also features advanced defect detection, classification, and analysis capabilities. The model can detect multiple defects on a single die and provide detailed analysis of each defect, enabling manufacturers to eliminate the time consuming process of manual defect analysis. Finally, TENCOR 5100 XP features an intuitive user interface, allowing users to quickly and easily create test settings and view the results with ease. 5100 XP also includes several automated measurement tools, such as a wafer probe station, wafer mover, and several other motorized instruments. All of these elements work together in a coordinated fashion to ensure maximum accuracy and throughput.
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